Flat-type magnetron body
Sealed cooling channels! Standard WSM & SSM bodies and PLANAR XT bodies available.
We offer flat-panel magnetrons for high-end technology applications. To date, we have sold over 350 large flat-panel magnetrons for various types of applications. Please use them for modifications and applications in new film deposition equipment. Additionally, we provide fully assembled process lids, both with and without pumps. This product series consists of three types of magnetrons: WSM, high-efficiency flat-panel magnetron HU-WSM, and Planar XT for large area flat-panel applications, as well as SSM and HU-SSM for small area applications. 【Features】 ■ Standard WSM & SSM Body - Simple target design - Target utilization rate of 30% with WSM (4500 kWh for 30mm Ag) - Film deposition uniformity <±1.0% ■ High Utilization Efficiency Flat-Panel HU-WSM & HU-SSM Body - Target lifetime of 6000 kWh (for 30mm Ag) - Extended target lifetime - Improved target utilization efficiency *For more details, please refer to the PDF document or feel free to contact us.
- Company：フォンアルデンヌジャパン
- Price：Other
